Structure and Specifications
The DH-03 series is specifically designed for research institutes, laboratories, and corporate R&D centers, suitable for developing a wide range of thin-film processes, materials research, and educational demonstrations. The system adopts a vertical top-opening chamber with internal dimensions of Φ400 × 400 mm. The top-opening design allows for easy operation and rapid replacement of substrates, targets, and process parameters—ideal for frequent experimental trials, academic instruction, and process demonstrations.
The chamber features a compact internal layout that can accommodate up to three targets simultaneously or operate with a single target independently. The multi-target configuration supports the deposition of multilayer, composite, and functional films, allowing researchers to study the effect of different material combinations on coating performance.
Arc Source and Process Configuration
The system is equipped with three high-performance cathodic arc sources (Φ100 × 40 mm), enabling quick target changes to achieve continuous multi-target deposition. Each arc source is independently controlled, allowing precise adjustment of arc current and bias voltage to modulate ion energy. This flexibility enables the formation of coatings with different characteristics, such as high-hardness films, wear-resistant coatings, or decorative layers. The multi-target mode also supports the creation of multilayer and gradient films, making it ideal for studying the relationship between coating structure and performance.
Vacuum and Control System
A high-efficiency vacuum pumping unit ensures rapid evacuation and stable high-vacuum operation, maintaining process purity and reproducibility. The fully automated control platform allows precise setting of key parameters—including arc current, bias voltage, gas flow rate, and deposition time—while providing real-time monitoring and data recording. The user-friendly interface makes it well-suited for both research and teaching applications.
Application Fields
The DH-03 series is widely used in academic and industrial research, supporting the following applications:
Thin-film material research and performance analysis
Development and optimization of new coating processes
Educational demonstrations and technical training
Small-batch coating of precision components for functional or decorative purposes
Depositable Materials
The system supports a wide range of metallic and compound targets, including titanium (Ti), chromium (Cr), and zirconium (Zr). By introducing reactive gases such as nitrogen or carbon–nitrogen mixtures, the system can deposit various functional and decorative coatings, including TiN, CrN, ZrN, and TiCN.
These coatings enhance surface hardness, wear resistance, and corrosion resistance while offering attractive visual effects.
Achievable Coating Colors:
Gold, silver, gunmetal, blue, and gradient multicolor films. The coatings exhibit uniform gloss, strong adhesion, and excellent durability—ideal for both functional studies and decorative coating demonstrations.
Combining compact design, flexible configuration, and stable performance, the DH-03 series provides an ideal platform for research institutions and laboratories conducting material studies, coating development, and technical training. It offers a clear and practical demonstration of vacuum coating principles and PVD process control, helping students and researchers gain a deeper understanding of the technology’s core mechanisms and performance advantages.
