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Structure and Specifications
The JSP-1612BY series is a multifunctional vacuum coating system designed for mass production of high-performance thin films on ultra-large workpieces. It adopts a vertical front-opening chamber design with an internal dimension of Φ1600 × 1200 mm (H). The spacious chamber can accommodate multiple large components simultaneously. The bottom-mounted rotary table supports both self-rotation and planetary rotation with adjustable speed, ensuring even particle distribution over large substrate surfaces. This design enables uniform film thickness, high density, and strong adhesion—ideal for applications requiring exceptional coating uniformity and stability, such as high-end cutting tools, automotive decorative parts, molds, and precision mechanical components.
Target and Process Configuration
The system is equipped with eight cylindrical magnetron targets and eight arc sources, arranged in two symmetric rows (upper and lower). This configuration enables hybrid operation combining magnetron sputtering and cathodic arc deposition within a single chamber. The rotating cylindrical targets ensure uniform erosion, extended target life, and reduced material waste, while the arc sources deliver high-energy ion flux for dense, well-adhered coatings.
System Configuration:
Four dual-pulse mid-frequency magnetron power supplies
One bias power supply (HorTeng Truplasma 4020)
One high-efficiency ion source
One high-performance turbomolecular pump system
Through various power and target combinations, the system supports the fabrication of multilayer, gradient, and composite film structures. A wide range of target materials can be used, including:
Metals: titanium (Ti), aluminum (Al), chromium (Cr), zirconium (Zr), tungsten (W), molybdenum (Mo), stainless steel (SUS), copper (Cu).
Nitrides and carbides: TiN, CrN, TiAlN, ZrN, WC/C, TiC.
Oxides: Al₂O₃, SiO₂, TiO₂, ZnO.
Carbon-based materials: DLC (diamond-like carbon) and graphite.
These materials can be used to create a variety of coatings—hard, wear-resistant, decorative, or conductive. By adjusting gas composition, target power, and bias voltage, film properties and compositions can be precisely controlled.
Vacuum and Control System
The JSP-1612BY employs a high-performance turbomolecular pump combined with a mechanical forepump to rapidly achieve and maintain a high-vacuum environment. This minimizes impurity gases, ensuring film purity and process stability. The fully automated control system allows simultaneous management of key process parameters such as target power, arc current, gas flow rate, table rotation speed, and deposition time. All data are displayed and recorded in real time, facilitating process analysis and batch traceability. The user interface supports both manual and automatic modes, making it suitable for both research and industrial-scale production.
Application Fields
The JSP-1612BY is widely used for large-scale industrial production of high-performance coatings, including:
Hard coatings: Applied to cutting tools, molds, stamping parts, and blades to enhance surface hardness, wear resistance, and thermal stability. Typical coatings include TiN, TiAlN, CrN, and AlCrN.
Anti-friction coatings: Used for bearings, piston rings, valves, and sliding components to reduce friction, minimize energy loss, and extend service life. Common coatings include WC/C, MoS₂, and DLC (diamond-like carbon).
Functional coatings: Applied to electronic components, sensors, optical lenses, and protective structures for conductivity, corrosion resistance, oxidation resistance, electromagnetic shielding, and infrared reflection. Materials include ITO, Al₂O₃, ZnO, and TiO₂.
Decorative coatings: Suitable for premium decorative products, watch cases, sanitary hardware, automotive parts, and architectural fittings, providing metallic gloss, mirror finish, or colorful appearances such as gold, black, blue, and rainbow.
Comprehensive Features
By integrating cylindrical magnetron sputtering with arc ion deposition technology, the JSP-1612BY achieves both high deposition rates and superior film quality. Its large chamber, robust stability, and flexible process adaptability make it an ideal solution for the complete workflow—from R&D to industrial-scale production—of high-hardness, wear-resistant, functional, and decorative coatings.
