Product Overview
The JSP-6060 series magnetron sputtering coating system is a research-grade and pilot-scale vacuum coating system. It features a vertical front-opening chamber with an internal dimension of Φ600 × 600 mm (H). The overall design is compact, user-friendly, and easy to maintain. The system is equipped with a bottom-mounted multifunctional rotating substrate holder that supports both self-rotation and planetary rotation, with adjustable speed to significantly improve film uniformity and density.
This series is ideal for research institutes, university laboratories, and enterprise R&D departments for the development of thin film processes, structural validation, and small-batch production.
Main Features
Vertical front-opening structure provides ample operation space and convenient sample loading/unloading.
Bottom-mounted heated rotating substrate holder supports both self-rotation and planetary rotation, enabling highly uniform film deposition.
Equipped with four rectangular planar magnetron targets, with flexible arrangement options to accommodate multiple process combinations.
Power supply options include DC, MF, HiPIMS, and RF modes.
High-performance molecular pump group ensures excellent high-vacuum conditions for pure and repeatable film deposition.
Fully automated control system precisely regulates power, gas flow, and deposition rate, supporting data recording and process traceability.
Compatible with a wide range of materials including metals, ceramics, oxides, and composite films.
Technical Specifications
| Chamber Size | Φ600 × 600 mm (H) |
| Number of Targets | 4 rectangular planar magnetron targets |
| Target Size | 100 × 400 mm (customizable) |
| Substrate Holder | Bottom-mounted, self-rotation + planetary rotation, with heating |
| Ultimate Vacuum | 5 × 10⁻⁵ Pa (or better) |
| Vacuum System | Molecular pump + mechanical pump combination |
| Power Configuration | DC / MF / HiPIMS / RF combinations available |
| Control System | Fully automatic PLC + touch screen control with process monitoring and data logging |
Model Configurations
JSP-6060A
Equipped with two DC magnetron power supplies, one MF power supply, and one RF power supply, along with a high-efficiency ion source for film densification or surface modification.
Suitable for research on metallic, composite, and functional films.
JSP-6060B
Equipped with one DC power supply, one HiPIMS power supply, and two RF power supplies.
This configuration enhances film density, adhesion, and microstructure control, making it suitable for high-performance functional films, decorative coatings, and precision component fabrication.
Application Fields and Typical Coatings
Hard Coatings
Application: Wear-resistant protection for cutting tools, molds, and precision mechanical components.
Typical Films: TiN, CrN, TiAlN, AlCrN.
Value: Greatly enhances surface hardness, corrosion resistance, and service life.
Low-Friction Coatings
Application: Friction pairs, bearings, and mold lubrication layers.
Typical Films: WC/C, MoS₂, DLC.
Value: Reduces friction coefficient, improves reliability, and enhances energy efficiency.
Functional Coatings
Application: Conductive layers, corrosion-resistant films, and electromagnetic shielding layers.
Typical Films: Cu, Ni, TiN, Cr, ZnO, AlN.
Value: Improves electrical properties and environmental stability, ideal for electronic and structural protection.
Decorative Coatings
Application: Metallic decorative surfaces, wear-resistant and anti-fingerprint coatings.
Typical Films: TiN, ZrN, CrN, TiCN, colored DLC.
Value: Combines aesthetics, durability, and cost-effectiveness.
Oxide Coatings
Application: Transparent conductive films, optoelectronic functional layers, dielectric reflective films.
Typical Films: ITO, Al₂O₃, TiO₂, ZnO, SiO₂.
Value: High transparency, excellent adhesion, suitable for display, photovoltaic, and optical device development.
Technical Advantages
Supports multiple sputtering modes: DC, MF, HiPIMS, and RF
Capable of single-layer, multilayer, and gradient film deposition
Stable and reliable vacuum system ensures purity and consistency
Process parameters can be easily replicated for research and scale-up
Modular design enables convenient maintenance and future expansion
Scope of Application
The JSP-6060 series is widely used in:
Surface engineering and functional coating research
Development of optoelectronic devices, MEMS, and sensors
Pilot-scale production of hard and low-friction coatings
Optimization of decorative and energy-saving film structures
New material formulation screening and performance validation
