Structure and Specifications
Process Overview:
The system adopts the Chemical Vapor Deposition (CVD) process, in which reactive gases are introduced into a sealed reaction chamber. A chemical reaction occurs on the heated inner surface of elongated tubes, forming the desired coating. The equipment structure is optimized for workpieces with a large length-to-diameter ratio, featuring a precision gas-flow and heating system to ensure uniform inner-wall deposition.
Adaptable Workpiece Sizes:
Φ40 mm × 3000 mm.
Φ100 mm × 6000 mm.
Φ150 mm × 4500 mm.
Target and Process Configuration
Heating System:
Utilizes resistance heating or induction heating, achieving operating temperatures up to 900–1100 °C. Suitable for deposition of various coating materials such as carbides, nitrides, and oxides.
Gas Supply System:
Equipped with multi-channel Mass Flow Controllers (MFCs) for precise control of gas composition and flow rate. Typical process gases include methane (CH₄),nitrogen (N₂), hydrogen (H₂), and oxygen (O₂).
Deposition Principle:
Under high temperature, reactive gases decompose or react at the tube’s inner surface to form dense coatings with strong adhesion.
Depositable Materials:
TiC, TiN, SiC, Al₂O₃,,Cr₃C₂, DLC (Diamond-Like Carbon), and other functional films.
Vacuum and Control System
The system employs either a mechanical pump + Roots pump combination or a low-vacuum direct-pressure gas line process, ensuring reaction stability through precise control of gas flow and temperature.
An integrated PLC fully automatic control system allows multi-recipe storage and enables real-time automation of temperature profiles, gas ratios, and deposition time, with complete process recording and traceability.
Application Scope
Widely used for inner-wall coatings requiring wear resistance, corrosion resistance, and high hardness, including:
Corrosion protection for chemical pipelines and reactor interiors.
Reinforcement of aerospace hydraulic system pipelines.
High-temperature wear-resistant coatings for components such as gas turbine interiors.
Precision machinery and military-grade tubular components requiring high-performance internal coatings.
