Structure and Specifications

This system utilizes advanced thermochemical surface treatment technologies such as glow ion nitriding, ion carburizing, and carbonitriding. It performs precise surface hardening of metal components under high vacuum or low-pressure controlled atmospheres. The system design is flexible, with optional vertical or horizontal furnace configurations. The furnace body features a double-layer water-cooling structure with a high-efficiency thermal insulation shield to ensure uniform temperature distribution and long-term stable operation.

Available effective treatment chamber sizes:
Φ600 × 600 mm
Φ1000 × 1300 mm
Up to Φ3500 × 10000 mm

The system accommodates a wide range of workpieces—from small precision molds to large mechanical parts—offering both batch production capability and high-temperature stability. Typical diffusion layer depth reaches 0.2–0.3 mm, with minimal deformation and excellent dimensional accuracy.

Process and Configuration
The system supports multiple plasma-assisted thermochemical processes, including:

  • Ion Nitriding

  • Ion Carburizing

  • Carbonitriding

The heating method employs DC glow discharge heating technology, precisely controlling the temperature in the range of 350–700 °C. The plasma generated by the discharge enables active atoms to diffuse directly into the metal surface, forming a dense, uniform, and strongly bonded diffusion layer.

Gas atmosphere control is achieved through a multi-channel Mass Flow Controller (MFC) system, allowing precise adjustment of nitrogen, methane, hydrogen, and other reactive gas ratios. This enables accurate control of layer thickness, microstructure, and mechanical properties.

Process advantages include:

  • High surface hardness, excellent wear resistance, and strong adhesion;

  • Oxide-free surface with superior smoothness;

  • Extremely low deformation and high dimensional stability;

  • Suitable for high-precision, long-duration processing of demanding workpieces.

Vacuum and Control System
The vacuum system consists of a mechanical pump and a Roots pump, capable of rapidly establishing and maintaining the low-pressure glow discharge environment required for ion diffusion.
The PLC automatic control platform enables full process parameter setup and real-time monitoring, precisely controlling temperature, gas ratios, treatment time, and diffusion depth.
Integrated process curve recording allows data traceability, recipe storage, and standardized intelligent production management.

Equipment Features

  • High-vacuum sealed structure prevents oxidation and contamination;

  • Excellent heating and atmosphere uniformity for batch processing of multiple parts;

  • High automation, user-friendly operation, and reliable safety;

  • Low energy consumption, easy maintenance, and stable long-term performance.

Application Scope
The vacuum nitriding and carburizing system is widely used for surface hardening and wear-resistance enhancement of metal parts. Typical applications include:

  • Molds: injection, die casting, cold stamping, and hot forging molds;

  • Cutting tools: turning tools, milling cutters, punches, and forming tools;

  • Precision mechanical parts: gears, shafts, valves, and connecting rods;

  • High-strength components in aerospace, energy, automotive, and heavy machinery industries.

By combining plasma activation with precise atmosphere control, this vacuum nitriding/carburizing system delivers high-quality, high-adhesion surface modification. Its process reproducibility, operational stability, and eco-friendly design make it an ideal surface enhancement solution for mold manufacturing, precision machining, and advanced manufacturing sectors.


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